VDI 2083 Blatt 3:2022-08
Current
Current
The latest, up-to-date edition.
Cleanroom technology - Metrology
Available format(s)
Hardcopy , PDF
Language(s)
German - English
Published date
01-08-2022
Publisher
This guideline describes measurement methods for cleanrooms and associated cleanroom areas that are used during handover, in the context of the qualification of new systems, routine control and ongoing monitoring.
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