ASTM F 1388 : 1992 : R2000
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors (Withdrawn 2003)
Hardcopy , PDF
11-05-2013
English
01-01-2000
CONTAINED IN VOL. 10.05, 2001 Covers the measurement of generation velocity and generation lifetime of silicon wafers. May be applied to insulators other than silicon dioxide and to semiconductor materials other than silicon, but the details of capacitor fabrication and the interpretation and analyses of data in such cases are not given in this test method (which applies to both bulk and epitaxial silicon).
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