ASTM F 1241 : 1995 : R2000
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Terminology of Silicon Technology (Withdrawn 2003)
Hardcopy , PDF
11-05-2013
English
06-10-2000
CONTAINED IN VOL. 10.05, 2001 Covers terms and definitions used in relation to semiconductor grade silicon crystal and wafers. Covers terms describing attributes of silicon wafers as specified in SEMI Specifications M1 and SEMI Format M18.
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