ASTM F 1630 : 2000
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Method for Low Temperature FT-IR Analysis of Single Crystal Silicon for III-V Impurities (Withdrawn 2003)
Hardcopy , PDF
11-05-2013
English
12-10-2000
CONTAINED IN VOL. 10.05, 2001 Determines the electrically active boron, phosphorus, arsenic, aluminium, antimony, and gallium concentration in single crystal silicon. This method can be used for silicon in which the impurity/dopant concentrations are between 0.01 ppba and 5.0 ppba for each of the electrically active elements.
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