ASTM F 1513 : 1999 : R2003
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications
Hardcopy , PDF
11-11-2014
English
12-10-1999
CONTAINED IN VOL. 10.04, 2015 Defines pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets.
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