ASTM F 1513 : 1999 : R2011
Withdrawn
Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications (Withdrawn 2020)
English
06-01-2011
01-09-2020
CONTAINED IN VOL. 10.04, 2015 Defines pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets.
| Committee |
F 01
|
| DocumentType |
Standard
|
| Pages |
2
|
| ProductNote |
Reconfirmed 2011
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
| Supersedes |
1.1 This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e-beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets).
1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
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| ASTM D 1971 : 2016 | Standard Practices for Digestion of Water Samples for Determination of Metals by Flame Atomic Absorption, Graphite Furnace Atomic Absorption, Plasma Emission Spectroscopy, or Plasma Mass Spectrometry |
| ASTM D 1971 : 2016 : REDLINE | Standard Practices for Digestion of Water Samples for Determination of Metals by Flame Atomic Absorption, Graphite Furnace Atomic Absorption, Plasma Emission Spectroscopy, or Plasma Mass Spectrometry |
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