DIN EN 62047-9:2012-03
Current
Current
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 9: WAFER TO WAFER BONDING STRENGTH MEASUREMENT FOR MEMS (IEC 62047-9:2011)
Available format(s)
Hardcopy , PDF
Language(s)
German
Published date
01-01-2012
US$144.27
Excluding Tax where applicable
| DevelopmentNote |
Supersedes DIN IEC 62047-9. (03/2012)
|
| DocumentType |
Standard
|
| Pages |
26
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| EN 62047-9:2011 | Identical |
| IEC 62047-9:2011 | Identical |
Summarise
US$144.27
Excluding Tax where applicable