DIN EN ISO 14644-8:2013-06
Superseded
View Superseded by
Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
Hardcopy , PDF
English, German
06-01-2013
09-28-2022
National foreword
National Annex NA (informative) - Bibliography
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) - Parameters for consideration
Annex B (informative) - Typical contaminants
Annex C (informative) - Typical methods of measurement
Annex D (informative) - Consideration of specific
requirements for separative devices
Bibliography
Describes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis time-weighted factors within the specification for classification.
| DocumentType |
Standard
|
| Pages |
30
|
| PublisherName |
German Institute for Standardisation (Deutsches Institut für Normung)
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| Standards | Relationship |
| NF EN ISO 14644-8 : 2013 | Identical |
| EN ISO 14644-8:2013 | Identical |
| NEN EN ISO 14644-8 : 2013 | Identical |
| I.S. EN ISO 14644-8:2013 | Identical |
| NS EN ISO 14644-8 : 2013 | Identical |
| NBN EN ISO 14644-8 : 2013 | Identical |
| ISO 14644-8:2013 | Identical |
| BS EN ISO 14644-8:2013 | Identical |
| BS EN ISO 14644-8:2013 | Equivalent |
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