ISO 14644-8:2013
Withdrawn
View Superseded by
Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)
Hardcopy , PDF
French, English
02-18-2013
04-09-2025
ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.
ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants.
ISO 14644-8:2013 does not give a classification of surface chemical contamination.
| Committee |
ISO/TC 209
|
| DevelopmentNote |
Supersedes ISO/DIS 14644-8. (02/2013)
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| DocumentType |
Standard
|
| Pages |
22
|
| ProductNote |
THIS STANDARD ALSO REFERS ISO 14698 , IEST-G-CC035, ASTM D5127-99, SEMI E108-0307, IEST-RP-CC031.2, JIS B9917-8:2010, SEMI E45-1101,SEMI E460307, SEMI F21-1102 .
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| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| SupersededBy | |
| Supersedes |
| Standards | Relationship |
| DIN EN ISO 14644-8:2013-06 | Identical |
| GOST R ISO 14644-8 : 2014 | Identical |
| NBN EN ISO 14644-8 : 2013 | Identical |
| NF EN ISO 14644-8 : 2013 | Identical |
| NEN EN ISO 14644-8 : 2013 | Identical |
| NS EN ISO 14644-8 : 2013 | Identical |
| I.S. EN ISO 14644-8:2013 | Identical |
| PN EN ISO 14644-8 : 2013 | Identical |
| SS-EN ISO 14644-8 : 2013 | Identical |
| BS EN ISO 14644-8:2013 | Identical |
| EN ISO 14644-8:2013 | Identical |
| UNE-EN ISO 14644-8:2014 | Identical |
A newer version of this standard is available.