EN ISO 14644-8:2013

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) - Parameters for consideration
Annex B (informative) - Typical contaminants
Annex C (informative) - Typical methods of measurement
Annex D (informative) - Consideration of specific
        requirements for separative devices
Bibliography

ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants.ISO 14644-8:2013 does not give a classification of surface chemical contamination.