EN ISO 25178-604:2013
Withdrawn
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments (ISO 25178-604:2013)
08-07-2013
02-28-2014
Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
of a coherence scanning interferometry
(CSI) microscope
Annex B (informative) - Coherence scanning interferometry
(CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
| Committee |
CEN/TC 290
|
| DocumentType |
Standard
|
| PublisherName |
Comite Europeen de Normalisation
|
| Status |
Withdrawn
|
| Standards | Relationship |
| NF EN ISO 25178-604 : 2013 | Identical |
| NBN EN ISO 25178-604 : 2013 | Identical |
| ISO 25178-604:2013 | Identical |
| PN EN ISO 25178-604 : 2013 | Identical |
| NS EN ISO 25178-604 : 2013 | Identical |
| I.S. EN ISO 25178-604:2013 | Identical |
| NEN EN ISO 25178-604 : 2013 | Identical |
| DIN EN ISO 25178-604:2013-12 | Identical |
| BS EN ISO 25178-604:2013 | Identical |
| DS EN ISO 25178-604 : 2013 | Identical |
| UNE-EN ISO 25178-604:2013 | Identical |
| ISO/TR 14638:1995 | Geometrical product specification (GPS) — Masterplan |
| ISO 8015:2011 | Geometrical product specifications (GPS) — Fundamentals — Concepts, principles and rules |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 14978:2006 | Geometrical product specifications (GPS) — General concepts and requirements for GPS measuring equipment |
| ISO 25178-6:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 6: Classification of methods for measuring surface texture |
| ISO 10934-2:2007 | Optics and optical instruments — Vocabulary for microscopy — Part 2: Advanced techniques in light microscopy |
| ISO 14253-1:2017 | Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications |
| ISO 25178-3:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology — Basic and general concepts and associated terms (VIM) |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
| VDI/VDE 2655 Blatt 1.1:2008-03 | Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement |
| ISO 9334:2007 | Optics and photonics — Optical transfer function — Definitions and mathematical relationships |
| ISO 25178-601:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments |
| ISO 25178-602:2010 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments |
| ISO 25178-2:2012 | Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters |