ISO 11952:2014
Withdrawn
View Superseded by
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
Hardcopy , PDF
English
05-12-2014
04-09-2025
ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
| Committee |
ISO/TC 201/SC 9
|
| DevelopmentNote |
DRAFT ISO/DIS 11952 is also available for this standard. (10/2014)
|
| DocumentType |
Standard
|
| Pages |
58
|
| PublisherName |
International Organization for Standardization
|
| Status |
Withdrawn
|
| SupersededBy |
| 16/30300288 DC : 0 | BS ISO 19606 - FINE CERAMICS (ADVANCED CERAMICS, ADVANCED TECHNICAL CERAMICS) - TEST METHOD FOR SURFACE ROUGHNESS OF FINE CERAMIC FILMS BY ATOMIC FORCE MICROSCOPY |
| PD ISO/TR 14187:2011 | Surface chemical analysis. Characterization of nanostructured materials |
| BS ISO 13095:2014 | Surface Chemical Analysis. Atomic force microscopy. Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement |
| ISO 13095:2014 | Surface Chemical Analysis — Atomic force microscopy — Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement |
| ISO/TR 19716:2016 | Nanotechnologies — Characterization of cellulose nanocrystals |
| BS ISO 19606:2017 | Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy |
| PD ISO/TR 19716:2016 | Nanotechnologies. Characterization of cellulose nanocrystals |
| ISO 19606:2017 | Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy |
| ISO/TR 14187:2011 | Surface chemical analysis — Characterization of nanostructured materials |
| ISO 12179:2000 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Calibration of contact (stylus) instruments |
| IEC TS 62622:2012 | Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| ISO 11039:2012 | Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate |
| ISO Guide 30:2015 | Reference materials — Selected terms and definitions |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
| ISO 12853:2015 | Microscopes — Information provided to the user |
| ISO 5436-1:2000 | Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures |
| ISO 18115-2:2013 | Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy |
| ISO Guide 34:2009 | General requirements for the competence of reference material producers |
| ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
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