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NF EN 62047-9 : 2012

Current

Current

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 9: WAFER TO WAFER BONDING STRENGTH MEASUREMENT FOR MEMS

Published date

01-12-2013

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DevelopmentNote
Indice de classement: C96-050-9. PR NF EN 62047-9 January 2010. (02/2010)
DocumentType
Standard
PublisherName
Association Francaise de Normalisation
Status
Current

Standards Relationship
EN 62047-9:2011 Identical
IEC 62047-9:2011 Identical

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