SEMI M18 : 2012
Current
The latest, up-to-date edition.
GUIDE FOR DEVELOPING SPECIFICATION FORMS FOR ORDER ENTRY OF SILICON WAFERS
12-01-2013
Describes the methodology for developing specification forms for order entry including: - how to identify form sections, form columns, and form headings; - instructions for line format and how to number items; - how to add new items appropriate to a given wafer product to the form, and - how to reference new items from another section of the form.
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