05/30104054 DC : DRAFT APR 2005
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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IEC 62047-3 - SEMICONDUCTOR DEVICES - PART 3: MICRO ELECTROMECHANICAL DEVICES - THIN FILM STANDARD TEST PIECE
Published date
23-11-2012
Publisher
Superseded date
30-11-2006
Superseded by
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| Committee |
EPL/47
|
| DocumentType |
Draft
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy |
| IEC 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
| ISO 15490:2008 | Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for tensile strength of monolithic ceramics at room temperature |
| IEC 62047-1:2016 | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
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