SEMI E128 : 2014

Name: SEMI E128 : 2014
Brand: SEMI
Availability: InStock

Superseded

View Superseded by

SPECIFICATION FOR XML MESSAGE STRUCTURES

Superseded date

11-03-2024

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes XML structures required to encode message header or 'envelope' information for synchronous and asynchronous messages. XML is used in software applications to encode information with tags that provide structure and data type information specified in XML Schemas.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (06/2003)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI E128:2014(R2024)

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