SEMI E134 : 2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
SPECIFICATION FOR DATA COLLECTION MANAGEMENT
06-04-2019
12-01-2013
Gives a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan.
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