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UNE-EN 62047-11:2013

Current

Current

The latest, up-to-date edition.

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-11-2013

£59.01
Excluding VAT

Committee
CTN 209/SC 47
DocumentType
Standard
Pages
23
PublisherName
Asociación Española de Normalización
Status
Current

Standards Relationship
I.S. EN 62047-11:2013 Equivalent
BS EN 62047-11:2013 Equivalent
EN 62047-11:2013 Identical
IEC 62047-11:2013 Identical

£59.01
Excluding VAT