UNI EN ISO 25178-603 : 2013
Current
The latest, up-to-date edition.
GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 603: NOMINAL CHARACTERISTICS OF NON-CONTACT (PHASE-SHIFTING INTERFEROMETRIC MICROSCOPY) INSTRUMENTS
11-26-2013
Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) Components of a phase-shifting
interferometric (PSI) microscope
Annex B (informative) - Phase-shifting interferometric
(PSI) microscope - Theory of operation
Annex C (informative) - Errors and corrections for
phase-shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS
matrix model
Bibliography
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.