15/30291643 DC : 0
NA
Status of Standard is Unknown
BS ISO 18516 - SURFACE CHEMICAL ANALYSIS - DETERMINATION OF LATERAL RESOLUTION AND SHARPNESS IN BEAM BASED METHODS
Hardcopy , PDF
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Guide on how to use this standard
6 Determination of image sharpness
7 Determination of effective lateral resolution by imaging
of gratings
8 Reporting results
Annex A (informative) - The relation between sharpness parameters
and effective lateral resolution
Annex B (informative) - Straight edge method: Systematic
underestimation of D[12-88] caused by insufficient
plateau length L[pl]
Annex C (informative) - Straight edge method: Required length
ranges for L[ESF]
Annex D (informative) - Straight edge method: The
uncertainty of D[12-88]
Annex E (informative) - Narrow stripe method: Systematic
overestimation of w[LSF] caused by
inappropriately large widths w[s] of the imaged stripe
Annex F (informative) - Narrow stripe method: The uncertainty
of w[LSF]
Annex G (informative) - Imaging of square gratings: Reduction
of image period for 3-stripe gratings
Annex H (informative) - Imaging of square gratings: Relation
between signal-to-noise ratio and effective lateral resolution
Annex I (informative) - Imaging of square gratings: Minimum number of
sampling points per period
Annex J (informative) - Imaging of square gratings: Uncertainty of re
determined by visual inspection of an image or linescan over
a series of gratings
Annex K (informative) - Imaging of square gratings: Uncertainty of
re determined by interpolation - extrapolation
Annex L (informative) - Determination of lateral resolution by imaging
of square gratings - Practical example for SIMS
Bibliography
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